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About Trillium

Experts in Vacuum, Cooling, and Abatement Systems

Trillium specializes in providing world-class vacuum pump repair, new and refurbished pumping systems, as well as accessories, spare parts and consumables. Our entire organization is dedicated to learning about your particular business needs and challenges, and working with you to ensure your success.

Trillium’s vacuum offerings include sale and service of dry, rotary piston, blower, rotary vane and cryogenics pumps. Trillium also services and supplies chillers, heat exchangers and gas abatement systems.

30+ Years of Experience

Serving industries since 2002, the partner you can rely on.

ISO 9001 Certified

Commited to delivering consistent, top-notch quality and service. 

A Wide Presence

Strategic locations and partners supporting customers wherever.

OEM & Service Expertise

OEM Manufacturing and comprehensive service solutions you can trust.

man servicing pump trillium
Our History

Since 2002, Trillium has grown from a specialized vacuum pump repair company into a global provider of vacuum, cryogenic, and thermal management solutions. Strategic acquisitions and expanded OEM capabilities have enabled Trillium to serve customers across a wide range of high-tech and industrial markets.

2002

Founding

Trillium founded by two former Edwards employees, acquiring a pump repair operation in Wilsonville, Oregon.

2004

Service Expansion

Trillium expanded into the Chiller Repair and Refurbished abatement services. 

2007

Cryogenic Capability Added

Acquired Temcon Industries in Hutto, TX - establishing a beach head in TX and gained cryo pump repair capability.

2008

OEM Entry (Chillers)

Became a chiller OEM through product line acquisition of the 40/80 chiller product line from Edwards.

2009

Service Capability Expansion

Acquired chiller repair business from Air Products in Arizona and strengthened chiller repair and service offerings.

2011

Industrial Market Entry

Entered the industrial vacuum market and became a pump OEM/machined components manufacturer.

2015

OEM Expansion (Cryogenics)

Became a cryogenic pump OEM through acquisition and accelerated cryo pump repair capability.

2018

Global Expansion

Trillium expanded its cryogenic services into the European market - Trillium AB.

2023

Market Expansion

Trillium expanded its industrial pump service capabilities through acquisition.

2023

Atlas Copco Acquisition

Acquired by Atlas Copco Group, expanding global reach and resources.

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