description
The Ebara "A" Series dry pumps although mechanically similar to their UERR predecessor, offer signficant advantages. A series pumps offer an on board electronics suite that provides pump health information to a hand held LCD controller typically mounted magnetically on the pump. A series pumps also feature enclosures for noise abatement and an optional silencer. Only the A150W comes in significant variants, with a T suffix featuring U-Tubes similar to the UERR series and a M type that has an integrated exhaust trap between the pump and the exhaust connection. Like the UERR, A series pumps are not multivoltage capable, requiring customers to specify the voltage required for operation. Interfaces for process tools are available for many process tools and come in standard, mini and micro form factors.
Trillium can supply the following refurbished Ebara Dry Pumps:
| Model | Pumping Speed | Ultimate Pressure | Motor Power |
|---|---|---|---|
| A10S | 42 CFM | 30 mTorr | 2.2 kW |
| A25S | 99 CFM | 30 mTorr | 3.7 kW |
| A30W | 125 CFM | 1 mTorr | 3.7 kW |
| A70W | 300 CFM | 1 mTorr | 3.7 kW |
| A150W | 640 CFM | 1 mTorr | 7.4 kW |
Description
This A10S is a Multi Stage Dry Pump part of the second generation of dry pumping solutions introduced by Ebara. It has a compact design and includes various sensors and controls reporting to the handheld LCD display or to a parent vacuum chamber to enhance the operation. It utilizes a water cooled canned motor driving multi stage tri-lobe roots pumping technology. The A10S is an excellent choice for load lock, transfer chambers and other relatively benign applications that can benefit from a dry pump.
| Pumping Speed | Ultimate Pressure | Motor Power | Inlet | Exhaust |
|---|---|---|---|---|
| 42 CFM | 30 mTorr | 2.2 kW | NW40 | NW40 |
Description
This A25S is a Multi Stage Dry Pump part of the second generation of dry pumping solutions introduced by Ebara. It has a compact design and includes various sensors and controls reporting to the handheld LCD display or to a parent vacuum chamber to enhance the operation. It utilizes a water cooled canned motor driving multi stage tri-lobe roots pumping technology. Due to its hot running design and high pumping speed, it is a popular choice for MOCVD reactors.
| Pumping Speed | Ultimate Pressure | Motor Power | Inlet | Exhaust |
|---|---|---|---|---|
| 106 CFM | 30 mTorr | 3.7 kW | NW40 | NW40 |
Description
This A30W is a Multi Stage Dry Pump part of the second generation of dry pumping solutions introduced by Ebara. It has a compact design and includes various sensors and controls reporting to the handheld LCD display or to a parent vacuum chamber to enhance the operation. The A30W features a dry pump and blower both with water cooled canned motor driving tri lobe roots rotors pumping technology. The A30W is an excellent choice for a wide range of applications where greater than 100 CFM of pumping speed is required. Ebara also offered an A30WN variant, which had nickel (N) plated rotors and case halves, which is recommend for applications where cast iron would normally be etched by corrosive gases.
| Pumping Speed | Ultimate Pressure | Motor Power | Inlet | Exhaust |
|---|---|---|---|---|
| 125 CFM | 1 mTorr | 3.7 kW | NW50 | NW40 |
Description
This A70W is a Multi Stage Dry Pump part of the second generation of dry pumping solutions introduced by Ebara. It has a compact design and includes various sensors and controls reporting to the handheld LCD display or to a parent vacuum chamber to enhance the operation. The A70W features a dry pump and blower both with water cooled canned motor driving tri lobe roots rotors pumping technology. The A70W is an excellent choice for a wide range of applications where greater higher pumping speed are required, such as Epitaxy Layer Deposition. Ebara also offered an A70WN variant, which had nickel (N) plated rotors and case halves, which is recommend for applications where cast iron would normally be etched by corrosive gases.
| Pumping Speed | Ultimate Pressure | Motor Power | Inlet | Exhaust |
|---|---|---|---|---|
| 300 CFM | 1 mTorr | 5.9 kW | NW50 | NW40 |
Description
This Ebara A150W is a Multi Stage Dry Pump part of the second generation of dry pumping solutions introduced by Ebara. It includes various sensors and controls reporting to the handheld LCD display or to a parent vacuum chamber to enhance the operation. The A150W features a dry pump and blower both with water cooled canned motor driving tri lobe roots rotors pumping technology. The A150W is an excellent choice for a wide range of applications where higher pumping speed are required, such as PECVD and LPCVD. Ebara offered the A150W in two different varieties. The A150W-T, has U-tubes between each compression stage to allow the deposition of byproduct outside the pump’s swept volume. The other variant, the A150W-M, use has no-interstage exhaust gas coolers, but instead has a heated exhaust trap between the pump exhaust and the facilities exhaust connection.
| Pumping Speed | Ultimate Pressure | Motor Power | Inlet | Exhaust |
|---|---|---|---|---|
| 640 CFM | 1 mTorr | 7.4 kW | ISO100 | NW40 |