More Refurbished Edwards Pumps

The Edwards iH600 Dry Pump was introduced as the follow-on to the iQDP80/QMB500 dry pumping system. This 3rd generation of dry pumps from Edwards (also hook and claw design) is ideally suited for applications that benefit from higher operating temperatures. While running near 120 degree Celsius, process gases which would ordinarily condense inside a cooler pump will pass through freely, preventing the pump from seizing due to particulate accumulation. Like the iQDP pump, the iH600 can be easily interfaced to process tools and offers a robust N2 purging system.

The iH600 has been manufactured since the late 1990s and with a pumping speed of 353 CFM, its main competitors were the Ebara A70W and the Alcatel ADS602P. The iH600 and was released in 5 vintages as follows. We recommend specifying the vintage you require when requesting pricing.

The Edwards iH1000 Dry Pump was introduced as the follow-on to the iQDP80/QMB1200 dry pumping system. This 3rd generation of dry pumps from Edwards (also hook and claw design) is ideally suited for applications that benefit from higher operating temperatures. While running near 120 degree Celsius, process gases which would ordinarily condense inside a cooler pump will pass through freely, preventing the pump from seizing due to particulate accumulation. Like the iQDP pump, the iH1000 can be easily interfaced to process tools and offers a robust N2 purging system.

The iH1000 has been manufactured since the late 1990s and with a pumping speed of 580 CFM, its main competitors were the Ebara A150WM and the Alcatel ADS1202P. The iH1000 and was released in 5 vintages as follows. We recommend specifying the vintage you require when requesting pricing.

The Edwards iH1800 Dry Pump was introduced to provide high pumping speeds for 300mm wafer semiconductor tools. This 3rd generation of dry pumps from Edwards (also hook and claw design) is ideally suited for applications that benefit from higher operating temperatures. While running near 120 degree Celsius, process gases which would ordinarily condense inside a cooler pump will pass through freely, preventing the pump from seizing due to particulate accumulation. Like its predecessor, the iQDP pump, the iH1800 can be easily interfaced to process tools and offers a robust N2 purging system.

The iH1800 has been manufactured since the late 1990s and with a pumping speed of 1060 CFM, its main competitors were the Ebara AAS300WN and the Alcatel ADS1202P. The iH1800 and was released in several vintages as follows. We recommend specifying the vintage you require when requesting pricing.

The Edwards iGx Series Dry Pumps were introduced as a complementary product to the iH series and essentially replace the iL series pumps. Like the iL, the iGX series pumps are best equipped for light to medium duty applications and are offered in 3 basic ranges: L – no N2 purge, N – includes N2 purge, and M – N2 purge and exhaust pressure monitoring. A more compact design saves precious factory or lab space and their integrated idle mode allows them to wind down to only consume 50 watts of power when full performance is not needed, typically between process cycles.

The Edwards iGx Series Dry Pumps were introduced as a complementary product to the iH series and essentially replace the iL series pumps. Like the iL, the iGX series pumps are best equipped for light to medium duty applications and are offered in 3 basic ranges: L – no N2 purge, N – includes N2 purge, and M – N2 purge and exhaust pressure monitoring. A more compact design saves precious factory or lab space and their integrated idle mode allows them to wind down to only consume 50 watts of power when full performance is not needed, typically between process cycles.

The EPX180 Dry Pumps offers on-tool pumping in a lighter and smaller package, requiring only 1.4 kilowatts of power. As the replacement for IPX100 series pumps, the EPX180 uses a unique, patented, single-shaft regenerative/ Holweck® stage mechanism. EPX pumps are capable of pumping from atmosphere to ultimate pressures below 1x 10-5 Torr.

Offering enhanced performance in a modular package, EPX pumps can be integrated onto a process tool or mounted remotely. Integrated electronics also provide simple communication connections to the process tool.

The EPX Series supports clean and light duty semiconductor processing applications such as load lock and transfer applications.

The EPX500 Dry Pumps offers on-tool pumping in a lighter and smaller package, requiring only 1.4 kilowatts of power. As the replacement for IPX500 series pumps, the EPX500 uses a unique, patented, single-shaft regenerative/ Holweck® stage mechanism. EPX pumps are capable of pumping from atmosphere to ultimate pressures below 1×10-5 Torr.

Offering enhanced performance in a modular package, EPX pumps can be integrated onto a process tool or mounted remotely. Integrated electronics also provide simple communication connections to the process tool.

The EPX Series supports clean and light duty semiconductor processing applications such as load lock and transfer applications.

Edwards XDS5 scroll pump is an excellent alternative to rotary vane pumps where oil free pumping is desirable. The XDS pumps in particular use an innovative bearing shield to isolate the vacuum environment from all forms of lubricant not only making them totally dry, but also protecting the bearing from any process gases. Vapor handling is enabled by an adjustable gas ballast; this allows the range of pumps to satisfy many applications that were previously off limits to other scroll pumps.

XDS succeeded Edwards original line of scroll pumps (EDSP and GVSP), which were actually rebadged Anest Iwata ISP scroll pumps. By all accounts, the XDS series is far superior to the EDSP and GVSP models in terms of reliability and durability.

Edwards XDS10 scroll pump is an excellent alternative to rotary vane pumps where oil free pumping is desirable. The XDS pumps in particular use an innovative bearing shield to isolate the vacuum environment from all forms of lubricant not only making them totally dry, but also protecting the bearing from any process gases. Vapor handling is enabled by an adjustable gas ballast; this allows the range of pumps to satisfy many applications that were previously off limits to other scroll pumps.

XDS succeeded Edwards original line of scroll pumps (EDSP and GVSP), which were actually rebadged Anest Iwata ISP scroll pumps. By all accounts, the XDS series is far superior to the EDSP and GVSP models in terms of reliability and durability.

Edwards XDS35i scroll pump is an excellent alternative to rotary vane pumps where oil free pumping is desirable. The XDS pumps in particular use an innovative bearing shield to isolate the vacuum environment from all forms of lubricant not only making them totally dry, but also protecting the bearing from any process gases. Vapor handling is enabled by an adjustable gas ballast; this allows the range of pumps to satisfy many applications that were previously off limits to other scroll pumps.

XDS succeeded Edwards original line of scroll pumps (EDSP and GVSP), which were actually rebadged Anest Iwata ISP scroll pumps. By all accounts, the XDS series is far superior to the EDSP and GVSP models in terms of reliability and durability.