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First introduced in the early 1980s, dry vacuum pumps have gradually supplanted oil sealed rotary vane and rotary piston pumps in a number of applications, but most prevalently in semiconductor manufacturing. The oil free pumping mechanism of a dry pump provides benefits both to the inherent vacuum process, but also in terms of waste stream management and facility cleanliness. Although most early dry pump were based upon multi-lobe roots and hook and claw technology; dry scroll, diaphragm and more recently screw mechanisms have become mainstream.

Closed cycle helium cryogenic systems serve a number of purposes within modern industry, but the primary applications are in temperature control and vacuum. Cryogenic coldheads are used in a number of cooling applications involving electronics and superconducting magnets. With the addition of a vacuum vessel and condensing arrays, a cold head becomes a cryogenic vacuum pump or a cryogenic water vapor pump, commonly known as cryopumps. Cryopumps enable such industries as semiconductor manufacturing, optical coating and environmental test as they can generate environments achieving very low pressures.

Temperature control units, which include both chillers and heat exchangers, fill a number of roles within a wide range of industries. In all cases the primary role is to provide a steady flow of cooling fluid to another piece of equipment at a very stable temperature. In some applications a chiller is required, as it has the ability to supply cooling fluid at a temperature below ambient. Of course, this same role can be satisfied using a heat exchanger, however only when the required fluid temperature is at or near ambient. In many cases, the need for a heat exchanger is to simply add a smaller and more controllable closed loop cooling fluid supply to keep the debris and deposits in a standard process cooling water system from clogging or deteriorating the equipment needing cooling. A chiller also provides this advantage.

Modern semiconductor manufacturing processes continue to evolve and include the use of more and more gases requiring some form of gas abatement. Whether for protection of personnel and facilities infrastructure or to meet company or government pollution prevention mandates, there are a number of gas abatement technologies available to meet your objectives.

Mechanical blower technology has existed for over 150 years and has proven to be a cost-effective solution to dramatically increase vacuum pumping speed. The most common type employs the figure-eight shaped Roots lobe, which is used in Stokes, Leybold, Edwards and many other manufacturers blower offerings. Adding a blower (or booster as they are often referred to) to your vacuum pump is quite economical as you can typically increase pumping speed more than 10X for less than double the price of your primary pump. Whether dry, rotary vane, rotary piston or even liquid ring technology, the addition of a blower is feasible with adequate consideration.

Trillium specializes in providing large packaged pumping systems capable of achieving a wide range of pumping speeds for a number of applications. Packaged pumps always include at least one rough pump (dry, rotary piston or rotary vane) and typically a mechanical booster.

With their roots in the late 1800s, oil sealed rotary vane vacuum pumps have been the workhorses of many industries for over 100 years. Available in both single and two compression stage varieties, there is likely a rotary vane pump that will achieve the pressure and pumping speed requirements for your application.