Refurbished Edwards Dry Pumps

The Edwards QDP Series Dry Pumps are an excellent choice for primary pumping requirements in a wide range of applications. Their low capital and repair cost, ease of operation and interface ability with a wide range of process tools make them the preferred choice for upgrading rotary vane pumping systems.

Following the 1st generation of air cooled Edwards CDP and DP series dry pumps, the QDP80 was launched featuring a more quiet water cooled motor and built in functionality for integration to a parent system. This 2nd generation of dry pumps from Edwards became the work horse of the semiconductor Industry in the mid 90’s, and many thousands are still in use today.

Mechanically, the QDP80 shares essentially the same pump module as its predecessors, as well as its successor, the iQDP. The QDP gas purge system, while functionally similar to the iQDP as well, is set and adjusted manually. The QDP electrical and electronic controls and sensors are provided by separate control modules available in varying degrees of sophistication.

The Edwards QDP Series Dry Pumps are an excellent choice for primary pumping requirements in a wide range of applications. Their low capital and repair cost, ease of operation and interface ability with a wide range of process tools make them the preferred choice for upgrading rotary vane pumping systems.

Following the 1st generation of air cooled Edwards CDP and DP series dry pumps, the QDP80/QMB250 was launched featuring quieter water cooled motors and built in functionality for integration to a parent system. This 2nd generation of dry pumps from Edwards became the work horse of the semiconductor Industry in the mid 90’s, and many thousands are still in use today.

Mechanically, the QDP80/QMB250 shares essentially the same pump module as its predecessors, as well as its successor, the iQDP. The QDP gas purge system, while functionally similar to the iQDP as well, is set and adjusted manually. The QDP electrical and electronic controls and sensors are provided by separate control modules available in varying degrees of sophistication.

The addition of the QMB250 Booster Pump mounted on top of the QDP80 significantly increases pumping capacity. For a more compact pumping package, the QDP80 and QMB250 can be directly mounted, or for ease of moving the QDP80 and QMB250 independent, the QMB can mounted in a booster fame, under which the QDP will sit.

The Edwards QDP Series Dry Pumps are an excellent choice for primary pumping requirements in a wide range of applications. Their low capital and repair cost, ease of operation and interface ability with a wide range of process tools make them the preferred choice for upgrading rotary vane pumping systems.

Following the 1st generation of air cooled Edwards CDP and DP series dry pumps, the QDP80/QMB500 was launched featuring quieter water cooled motors and built in functionality for integration to a parent system. This 2nd generation of dry pumps from Edwards became the work horse of the semiconductor Industry in the mid 90’s, and many thousands are still in use today.

Mechanically, the QDP80/QMB500 shares essentially the same pump module as its predecessors, as well as its successor, the iQDP. The QDP gas purge system, while functionally similar to the iQDP as well, is set and adjusted manually. The QDP electrical and electronic controls and sensors are provided by separate control modules available in varying degrees of sophistication.

The addition of the QMB500 Booster Pump mounted on top of the QDP80 significantly increases pumping capacity. For a more compact pumping package, the QDP80 and QMB500 can be directly mounted, or for ease of moving the QDP80 and QMB500 independent, the QMB can mounted in a booster fame, under which the QDP will sit.

The Edwards QDP Series Dry Pumps are an excellent choice for primary pumping requirements in a wide range of applications. Their low capital and repair cost, ease of operation and interface ability with a wide range of process tools make them the preferred choice for upgrading rotary vane pumping systems.

Following the 1st generation of air cooled Edwards CDP and DP series dry pumps, the QDP80/QMB1200 was launched featuring quieter water cooled motors and built in functionality for integration to a parent system. This 2nd generation of dry pumps from Edwards became the work horse of the semiconductor Industry in the mid 90’s, and many thousands are still in use today.

Mechanically, the QDP80/QMB1200 shares essentially the same pump module as its predecessors, as well as its successor, the iQDP. The QDP gas purge system, while functionally similar to the iQDP as well, is set and adjusted manually. The QDP electrical and electronic controls and sensors are provided by separate control modules available in varying degrees of sophistication.

The addition of the QMB1200 Booster Pump mounted on top of the QDP80 significantly increases pumping capacity. Do to the size and weight of the QMB1200, the best and safest option for coupling it to the QDP80 is the use of an independent booster frame.

The Edwards iQDP40 Dry Pump uses a nearly identical pumping mechanism as the QDP40, plus it features an integrated electronics and control suite enabling the user to easily monitor and report a wide range of pump health outputs and detect issues automatically. When integrated with a Tool Interface Module, an iQDP pumping system communicates easily with any parent equipment. In addition, the pump can be networked for remote monitoring using a Network Interface Module and proprietary software/hardware from Edwards. Like the QDP series, the iQDP pump can be diluted with up to 50SLM of nitrogen purge for the harshest applications.

The Edwards iQDP40/QMB250 Dry Pump uses a nearly identical pumping mechanism as the QDP40/QMB250, plus it features an integrated electronics and control suite enabling the user to easily monitor and report a wide range of pump health outputs and detect issues automatically. When integrated with a Tool Interface Module, an iQDP pumping system communicates easily with any parent equipment. In addition, the pump can be networked for remote monitoring using a Network Interface Module and proprietary software/hardware from Edwards. Like the QDP series, the iQDP pump can be diluted with up to 50SLM of nitrogen purge for the harshest applications.

The addition of the QMB250 Booster Pump mounted on top of the iQDP40 significantly increases pumping capacity. For a more compact pumping package, the iQDP40 and QMB250 can be directly mounted, or for ease of moving the iQDP40 and QMB250 independent, the QMB can mounted in a booster fame, under which the iQDP will sit.

The Edwards iQDP40/QMB500 Dry Pump uses a nearly identical pumping mechanism as the QDP40/QMB500, plus it features an integrated electronics and control suite enabling the user to easily monitor and report a wide range of pump health outputs and detect issues automatically. When integrated with a Tool Interface Module, an iQDP pumping system communicates easily with any parent equipment. In addition, the pump can be networked for remote monitoring using a Network Interface Module and proprietary software/hardware from Edwards. Like the QDP series, the iQDP pump can be diluted with up to 50SLM of nitrogen purge for the harshest applications.

The addition of the QMB500 Booster Pump mounted on top of the IQDP40 significantly increases pumping capacity. For a more compact pumping package, the IQDP40 and QMB500 can be directly mounted, or for ease of moving the IQDP40 and QMB500 independently, the QMB can mounted in a booster fame, under which the IQDP will sit.

The Edwards iQDP80 Dry Pump uses a nearly identical pumping mechanism as the QDP80, plus it features an integrated electronics and control suite enabling the user to easily monitor and report a wide range of pump health outputs and detect issues automatically. When integrated with a Tool Interface Module, an iQDP pumping system communicates easily with any parent equipment. In addition, the pump can be networked for remote monitoring using a Network Interface Module and proprietary software/hardware from Edwards. Like the QDP series, the iQDP pump can be diluted with up to 50SLM of nitrogen purge for the harshest applications.

The Edwards iQDP80/QMB250 Dry Pump uses a nearly identical pumping mechanism as the QDP80/QMB250, plus it features an integrated electronics and control suite enabling the user to easily monitor and report a wide range of pump health outputs and detect issues automatically. When integrated with a Tool Interface Module, an iQDP pumping system communicates easily with any parent equipment. In addition, the pump can be networked for remote monitoring using a Network Interface Module and proprietary software/hardware from Edwards. Like the QDP series, the iQDP80/QMB250 pump can be diluted with up to 50SLM of nitrogen purge for the harshest applications.

The addition of the QMB250 Booster Pump mounted on top of the iQD840 significantly increases pumping capacity. For a more compact pumping package, the iQDP80 and QMB250 can be directly mounted, or for ease of moving the iQDP80 and QMB250 independently, the QMB can mounted in a booster fame, under which the iQDP will sit.

The Edwards iQDP80/QMB500 Dry Pump uses a nearly identical pumping mechanism as the QDP80/QMB500, plus it features an integrated electronics and control suite enabling the user to easily monitor and report a wide range of pump health outputs and detect issues automatically. When integrated with a Tool Interface Module, an iQDP pumping system communicates easily with any parent equipment. In addition, the pump can be networked for remote monitoring using a Network Interface Module and proprietary software/hardware from Edwards. Like the QDP series, the iQDP80/QMB500 pump can be diluted with up to 50SLM of nitrogen purge for the harshest applications.

The addition of the QMB500 Booster Pump mounted on top of the IQDP80 significantly increases pumping capacity. For a more compact pumping package, the IQDP80 and QMB500 can be directly mounted, or for ease of moving the IQDP80 and QMB500 independently, the QMB can mounted in a booster fame, under which the IQDP will sit.

The Edwards iQDP80 Dry Pump uses a nearly identical pumping mechanism as the QDP80, plus it features an integrated electronics and control suite enabling the user to easily monitor and report a wide range of pump health outputs and detect issues automatically. When integrated with a Tool Interface Module, an iQDP pumping system communicates easily with any parent equipment. In addition, the pump can be networked for remote monitoring using a Network Interface Module and proprietary software/hardware from Edwards. Like the QDP series, the iQDP80/QMB1200 pump can be diluted with up to 50SLM of nitrogen purge for the harshest applications.

The addition of the QMB1200 Booster Pump mounted on top of the QDP80 significantly increases pumping capacity. Do to the size and weight of the QMB1200, the best and safest option for coupling it to the QDP80 is the use of an independent booster frame.

The Edwards QMB250 Booster Pump series is the follow-on water cooled motor version of the Edwards EH250. It features twin rotary lobes driven by a hydrokinetic drive mechanism that allows the pump to slip at high pressures to avoid stalling and provide pumping assistance from nearly atmospheric pressure. Its water-cooled motor significantly reduces noise and local heat generation. Like all blowers, it requires a suitable backing pump such as an Edwards iQDP40 or iQDP80.

The Edwards QMB500 Booster Pump series is the follow-on water cooled motor version of the Edwards EH500. It features twin rotary lobes driven by a hydrokinetic drive mechanism that allows the pump to slip at high pressures to avoid stalling and provide pumping assistance from nearly atmospheric pressure. Its water-cooled motor significantly reduces noise and local heat generation. Like all blowers, it requires a suitable backing pump such as an Edwards iQDP40 or iQDP80.

The Edwards QMB1200 Booster Pump series is the follow-on water cooled motor version of the Edwards EH1200. It features twin rotary lobes driven by a hydrokinetic drive mechanism that allows the pump to slip at high pressures to avoid stalling and provide pumping assistance from nearly atmospheric pressure. Its water-cooled motor significantly reduces noise and local heat generation. Like all blowers, it requires a suitable backing pump such as an Edwards iQDP80.