description
Hybrid scrubbers combine the destructive power of a combustion system with the acid handling capability of a wet scrubber. Therefore, they require the user to provide both a combustion source (electricity or fuel) and an acid waste water drain/treatment solution. Due to this, hybrid scrubbers are well suited for large volume manufacturing where the cost of establishing these facilities can be amortized over a larger amount of equipment. In addition, hybrid scrubbers with multiple inlets allow the user to abate several different exhaust streams with a single unit.
Trillium can supply the following refurbished Hybrid Scrubbers:
| Make | Model | Fuel Type | Typical Applications | PFC Abatement | Inlets | Max Flow Rates |
|---|---|---|---|---|---|---|
| ATMI/Ecosys | CDO | None | Etch/CVD | No | 1-4 | 110 SLM |
| Edwards | Helios | CH4 | Epi (H2) | No | 1-4 | 220 SLM |
| Edwards | TCS | CH4 | Etch/CVD | No | 1-4 | 180 SLM |
| Edwards | TPU | CH4 & O2 | Etch/CVD | Yes | 1-4 | 600 SLM |
Description
The Edwards Thermal Processing Unit (TPU) was the first mass produced hybrid abatement system capable of abating greenhouse gases. Like its sister product, the Edwards Thermal Conditioning System (TCS), the TPU cabinet houses both a combustion (burn) and wet scrubber. By adding an Oxygen supply to the unit, the combustion temperature is elevated to enable the TPU to crack the greenhouses gases like C2F6, NF3, and SF6, which are commonly used for chamber cleaning in the harshest of semiconductor applications such as PECVD.
The TPU can be configured with 1-4 inlets and can handle up to 200 SLM of gas flow. It is typically integrated into the parent tool or chambers control system such that Oxygen is only consumed when the unit is required to be in high fire mode for PFC abatement.
Trillium provides end users with refurbished TPUs, spare parts and on-site service to improve system reliability and uptime.
| Fuel Type | Typical Applications | Voltage | Inlets |
|---|---|---|---|
| CH4 and O2 | Etch and CVD | 110/230 1 Ph | 1-4 |
Description
The Edwards Thermal Conditioning System (TCS) was introduced as an alternative to the Delatech CDO, which was the industry standard burn/wet system at the time. With its improved reliability and more sophisticated control system, the TCS quickly became the go-to non-PFC abatement system for Etch and CVD applications. Unlike the CDO, the TCS uses a true combustion chamber fueled by Natural Gas and controlled with a proprietary ceramic liner.
The TCS can be configured with 1-4 inlets and can handle up to 200 SLM of gas flow. It is typically integrated into the parent tool or chambers control system such that unit’s status (on or offline) is known to the equipment operator.
Trillium provides end users with refurbished TCSs, spare parts and on-site service to improve system reliability and uptime.
| Fuel Type | Typical Applications | Voltage | Inlets |
|---|---|---|---|
| CH4 | Etch and CVD | 110/230 1 Ph | 1-4 |
Description
The Edwards Helios was introduced to fill a niche in the Epitaxy (EPI) areas of semiconductor fabrication plants. Based upon the TPU and TCS systems, the Helios is designed to handle much higher flow rates of Hydrogen which are common during the deposition of Epitaxial layers.
The Helios can be configured with 1-4 inlets, although most EPI application flow rates limit the unit to a single inlet. It is typically integrated into the parent tool or chamber’s control system such that unit’s status (on or offline) is known to the equipment operator.
Trillium provides end users with refurbished Helios’s, spare parts and on-site service to improve system reliability and uptime.
| Fuel Type | Typical Applications | Voltage | Inlets |
|---|---|---|---|
| CH4 | Etch and CVD | 110/230 1 Ph | 1-4 |