description
Trillium’s range of Cryo-Plex cryo pumps achieve a wide range of vacuum conditions in key applications – from small scale research to large space chamber applications. Cryo-Plex cryo pumps feature a modular and scalable design, custom tailored to meet the unique challenges of any high, or ultra-high, vacuum environment. Cryo-Plex pumps are an excellent choice for installation on new vacuum chambers, but are also fully compatible with similar sized CTI pumps and compressors, making them an ideal option as spares or replacements. Cryo-Plex cryo pumps are available in ISO, CF, ANSI, CVC, custom configurable size flanges, and can be packaged with a range of M series compressors and accessories based upon your requirement.
The new CryoPlex Cryo Pumps include:
Gas Pumping Speeds (liters/second)
| Gas | CP8 | CP8LP | CP10 | CP16 |
|---|---|---|---|---|
| Air | 1,500 | 1,500 | 3,000 | 5,000 |
| Water | 4,000 | 4,000 | 9,000 | 16,000 |
| Hydrogen | 2,500 | 2,200 | 5,000 | 5,000 |
| Argon | 1,200 | 1,200 | 2,500 | 4,200 |
Additional Capacities and Specifications
| Specification | CP8 | CP8LP | CP10 | CP16 |
|---|---|---|---|---|
| Argon Capacity (Liters) | 1,000 | 1,000 | 2,000 | 2,500 |
| Hydrogen Capacity* (Liters) | 18 | 12 | 24 | 15 |
| Cooldown to 20K (mins) | 90 | 90 | 90 | 150 |
| Overall Height (mm) | 502 | 179 | 607 | 589 |
| Weight (lb) | 45 | 42 | 85 | 160 |
* At 5 x 10 -6 Torr
Description
Industry-Standard Cryopump for Research and Production Applications
Trillium’s Cryo-Plex 8 cryopump is a high quality cryogenic vacuum pump with proven two-stage cold head design (Gifford/McMahon principle) that captures water vapor and gasses at high pumping speeds, resulting in oil-free high and ultra-high vacuums. Cryo-Plex 8 can be configured to support a wide range of research and production applications and is an integral component of Trillium’s’ cryogenic high vacuum solutions.
Key Features & Benefits
- Industry Standard Design: Ensuring quick and simple installation, exchange and upgrade so mission critical processes perform at peak efficiency with minimum downtime. Inlet flange configurations conform to ANSI, ISO and Conflat® specifications. Cryo-Plex 8 is easily interchangeable with other OEM cryopumps.
- Flexible Configuration: Cryo-Plex 8 can be configured and accessorized to support a wide range of demanding research and production applications. It can be used in any mounting position for industry-standard or custom designs. Silicon diode or hydrogen-vapor-bulb (HVB) sensors measure temperatures at second stage to help control the regeneration process (dual diodes are also available).
- Quality Manufacturing: Trillium US Inc. is committed to providing quality products that reliably meet the demanding requirements of our customers’ applications. We take a personal approach to ensure complete customer satisfaction. Our Austin, Texas based manufacturing facility has been ISO 9001 certified for more than fifteen years.
| Pumping Speed (l/s) | ||||
|---|---|---|---|---|
| H2O | Air | H2 | Ar | Cooldown (Minutes) |
| 4000 | 1500 | 2500 | 1200 | 90 |
Description
Industry-Standard Cryopump for Research and Production Applications
Cryo-Plex 8LP has a body/flange orientation mounted 90 degrees from the centerline of the pump, shortening the profile height over 66% from our standard Cryo-Plex 8 cryopump design.
Key Features & Benefits
- Industry Standard Design: Cryo-Plex 8LP inlet flange configurations conform to industry standard ANSI, ISO and Conflat® and full UHV specifications, allowing seamless integration into existing process infrastructures and easy exchange with other OEM cryopumps.
- Flexible Configuration: Cryo-Plex 8LP can be configured and accessorized to support a wide range of demanding research and production applications. It can be used in any mounting position for industry-standard or custom designs. Silicon diode or hydrogen-vapor-bulb (HVB) sensors measure temperatures at second stage to help control the regeneration process (dual diodes are also available).
- Quality Manufacturing: Trillium US Inc. is committed to providing quality products that reliably meet the demanding requirements of our customers’ applications. We take a personal approach to ensure complete customer satisfaction. Our Austin, Texas based manufacturing facility has been ISO 9001 certified for more than fifteen years.
| Pumping Speed (l/s) | ||||
|---|---|---|---|---|
| H2O | Air | H2 | Ar | Cooldown (Minutes) |
| 4000 | 1500 | 2200 | 1200 | 90 |
Description
Scalable High Capacity Cryopump to Support Large Chamber Applications
Trillium’s Cryo-Plex 10 inlet flange configurations conform to industry standard ANSI, ISO and Conflat® and full UHV specifications, allowing seamless integration into existing process infrastructures and easy exchange with other OEM cryopumps. Choose Cryo-Plex 10 so mission critical processes can consistently perform at peak efficiency with minimum downtime.
Key Features & Benefits
- Industry Standard Design: Ensuring quick and simple installation, exchange and upgrade so mission critical processes perform at peak efficiency with minimum downtime. Inlet flange configurations conform to ANSI, ISO and Conflat® specifications as well as full UHV. Cryo-Plex 10 is easily interchangeable with other OEM cryopumps.
- Flexible Configuration: Cryo-Plex 10 can be configured and accessorized to support a wide range of demanding research and production applications. It can be used in any mounting position for industry-standard or custom designs. Silicon diode or hydrogen-vapor-bulb (HVB) sensors measure temperatures at second stage to help control the regeneration process (dual diodes are also available).
- Quality Manufacturing: Trillium US Inc. is committed to providing quality products that reliably meet the demanding requirements of our customers’ applications. We take a personal approach to ensure complete customer satisfaction. Our Austin, Texas based manufacturing facility has been ISO 9001 certified for more than fifteen years.
| Pumping Speed (l/s) | ||||
|---|---|---|---|---|
| H2O | Air | H2 | Ar | Cooldown (Minutes) |
| 9000 | 3000 | 5000 | 2500 | 90 |
Description
High Capacity and High Performance in a Proven Cryopump Design
Trillium’s Cryo-Plex 16 cryopump is a high quality cryogenic vacuum pump with proven two-stage cold head design (Gifford/McMahon principle) that captures water vapor and gasses at high pumping speeds, resulting in oil-free high and ultra-high vacuums. Cryo-Plex 16 meets the capacity and performance requirements of many large chamber applications. Single-pump solutions simplify installation and maintenance, improve efficiency and lower total cost of ownership, making Cryo- Plex 16 a preferred solution for box-coating systems, space simulation chambers and electron beam coating systems.
Key Features & Benefits
- Industry Standard Design: Ensuring quick and simple installation, exchange and upgrade so mission critical processes perform at peak efficiency with minimum downtime. Inlet flange configurations conform to ISO and CVC. Cryo-Plex 16 is easily interchangeable with other OEM cryopumps.
- Flexible Configuration: Cryo-Plex 16 can be configured and accessorized to support a wide range of demanding research and production applications. It can be used in any mounting position for industry-standard or custom designs. Silicon diode or hydrogen-vapor-bulb (HVB) sensors measure temperatures at second stage to help control the regeneration process (dual diodes are also available).
- Quality Manufacturing: Trillium US Inc. is committed to providing quality products that reliably meet the demanding requirements of our customers’ applications. We take a personal approach to ensure complete customer satisfaction. Our Austin, Texas based manufacturing facility has been ISO 9001 certified for more than fifteen years.
| Pumping Speed (l/s) | ||||
|---|---|---|---|---|
| H2O | Air | H2 | Ar | Cooldown (Minutes) |
| 16000 | 6000 | 5000 | 5000 | 150 |
Description
The Trillium, Gifford-McMahon cycle, cryogenic cold head is the heart of any cryopump system. The 350CS, 1020CS, and 1050CS cryogenic cold heads cover a wide range of refrigeration capacities, weight requirements, cool-down times, and cryogenic applications. Their proven reliable and industry-standard, single or dual stage, design allows for seamless integration and maintenance.
Key Features & Benefits:
- Flexible Configuration: Cryo-Plex cryogenic cold heads meet a multitude of cryogenic requirements and demands across varying industries. Apply Cryo- Plex cold heads to an existing system, or in conjunction with the Oxford Instruments Austin line of cryopumps and closed-cycle helium compressors.
- 350CS Compact 20/5 GM: The 350CS is a compact single or dual stage cryogenic cold head designed specifically to support a wide range unique research and production applications. The 350CS is suitable for satellite communication stations, Astronomy, low noise microwave amplifiers, materials research, spectroscopy and for cooling superconductors.
- 1020CS High Capacity 35/12 GM: The 1020CS is a dedicated dual stage high capacity cryogenic cold head. The 1020CS is suitable for applications where a higher heat load is present at both 77K and 20K.
- 1050CS High Capacity 65/7 GM: The 1050CS is the highest capacity cryogenic cold head available in both dual and single stage models. The 1050CS is suitable for high heat load applications where a high radiated heat load is present (larger vessels or large radiated heat shield surface area).
- Quality Manufacturing: Trillium US Inc. is committed to providing quality products that reliably meet the demanding requirements of our customers’ applications. We take a personal approach to ensure complete customer satisfaction. Our Austin, Texas based manufacturing facility has been ISO 9001 certified for more than fifteen years.
Refrigeration Capacity (watts)
| Model | 350CS | 1020CS | 1050CS |
|---|---|---|---|
| 77 K | 20 Watts | 35 Watts | 65 Watts |
| 20 K | 5 Watts | 12 Watts | 7 Watts |
| Cooldown (minutes) 20K | 50 | 50 | 40 |
Description
Significantly improve vacuum pressure with no impact on existing configuration
Trillium’s line of cryogenic water pumps significantly improve water vapor pumping capability and reduce vacuum pump down time with no interference to the existing chamber equipment and performance. Water pumps are a cost effective way of upgrading existing vacuum chambers equipped with cryopumps, turbo-molecular or diffusion pumps. Trillium’s water pumps use time tested cryogenic cold head design on a number of cryo panel configurations providing standard and custom water pumping solutions.
Cryogenic Water Pump Models:
- In-Line/Appendage Cryogenic Water Pump: Designed for integration with existing pumping mechanism, while providing dedicated and extensive water vapor pumping capacity for any vacuum system.
- In-Situ Cryogenic Water Pump: The largest and most customizable water vapor pumping solution for any vacuum system.