Dry Pump Repair

Trillium specializes in dry pump service, and we have made unparalleled investments to provide the absolute highest levels of service and support for your Edwards, Ebara and Alcatel based pumping systems.

Rebuild and Testing Processes
Special Processes

Trillium takes great care to ensure each dry pump repair performs to our stringent internal standards, as well as your requirements. Highlights of the process include:

Expert assembly by fully trained technicians, done safely with ergonomically designed work stations, and the appropriate material handling equipment.

Complete disassembly, thorough cleaning, and a rigorous inspection process to identify any worn components or parts.

Detailed incoming inspection with multiple-angle photos—used later to ensure the product is returned in the same configuration, including any pump accessories.

Comprehensive testing to verify base pressure, pumping speed, motor current, pump temperature, and a number of other key performance criteria. Copy of final test report provided.

The difference between a Trillium dry pump repair and our competitors is in the attention we pay to many of the subassemblies on board.

Claw Recoating

All Teflon coated parts are stripped and recoated on every rebuild. This work is performed in house, which allows us to tightly control the process and offer the lowest cost.

Motor Rebuilding

Motors are rebuilt with new bearings, and undergo extensive testing to ensure electrical safety and adequate water cooling.

N2 Purge System

Gas modules are helium leak checked, and all digital flow readings are verified against calibrated analog gauges.

Water Cooling Systems

Thermal Control Valves and other cooling system components are descaled, rebuilt and fully pressure tested hydrostatically.

Electrics and Sensor Modules

Independent testing of each module prior to installation on the pump ensure proper operation. Trillium maintains board level repair capability, and we can fix nearly any problem with these subsystems.