description
Refurbished CTI CryoPumps provide the proven performance and reliability that have made CTI a trusted name in cryogenic vacuum technology for decades. Expertly rebuilt, inspected, and tested, these pumps deliver dependable high-vacuum performance for various demanding processes while offering a cost-effective alternative to new equipment.
Description
Along with Trillium’s CryoPlex 8 series, the CTI CryoTorr 8 series of cryo pumps comprise the majority of 8” cryo pumps used in semiconductor, vacuum coating, and R&D applications. Sharing the same design as Cryoplex 8, the CryoTorr 8 is offered in a range of configurations including ASA/ANSI, ISO, and Conflat flanges along with a full UHV version, which incorporates additional metal seals in lieu of traditional orings.
Trillium provides world-class support for your CryoTorr 8 including technical support, expert repair service, as well as a full range of spare parts and repair kits for every repair approach.
CryoTorr 8 offers the following performance. Included is the performance of the smaller and larger sizes available for comparison.
| Pumping Speed (l/s) | |||||
|---|---|---|---|---|---|
| Model | H2O | Air | H2 | Ar | Cooldown (Minutes) |
| CT4 | 1100 | 370 | 370 | 310 | 75 |
| CT8 | 4000 | 1500 | 2500 | 1200 | 90 |
| CT10 | 9000 | 3000 | 5000 | 2500 | 100 |
Trillium stocks a wide range of refurbished CryoTorr 8s for immediate exchange or outright purchase. The most popular models include the following, ask for these by PN when requesting a quote:
| CTI PN | Flange | Temp Measurement |
|---|---|---|
| 8033167 | ASA/ANSI | Diode |
| 8033168 | ASA/ANSI | VPG |
| 8033169 | Conflat | VPG |
| 8033179 | ISO | Diode |
Description
Along with Trillium’s CryoPlex 8LP series, the CTI CryoTorr 8F series of cryo pumps comprise the majority of low-profile 8” cryo pumps used in semiconductor, vacuum coating, and R&D applications. Sharing the same design as Cryoplex 8F, the CryoTorr 8F is offered in a range of configurations including ASA/ANSI, ISO, and Conflat flanges along with a full UHV version, which incorporates additional metal seals in lieu of traditional orings.
Trillium provides world-class support for your CryoTorr 8F including technical support, expert repair service, as well as a full range of spare parts and repair kits for every repair approach.
CryoTorr 8F offers the following performance. Included is the performance of the smaller and larger sizes available for comparison.
| Pumping Speed (l/s) | |||||
|---|---|---|---|---|---|
| Model | H2O | Air | H2 | Ar | Cooldown (Minutes) |
| CT4F | 1100 | 370 | 370 | 310 | 75 |
| CT8F | 4000 | 1500 | 2500 | 1200 | 90 |
| CT250F | 6500 | 2200 | 3200 | 1800 | 120 |
Trillium stocks a wide range of refurbished CryoTorr 8Fs for immediate exchange or outright purchase. The most popular models include the following, ask for these by PN when requesting a quote:
| CTI PN | Flange | Temp Measurement |
|---|---|---|
| 8033295 | ASA/ANSI | Diode |
| 8107038 | ASA/ANSI | Diode |
| 8107813 | ASA/ANSI | Diode |
| 8107814 | ASA/ANSI | Diode |
| 8107819 | Conflat | Diode |
Description
Along with Trillium’s CryoPlex 10 series, the CTI CryoTorr 10 series of cryo pumps comprise the majority of 10” cryo pumps used in semiconductor, vacuum coating, and R&D applications. Sharing the same design as Cryoplex 10, the CryoTorr 10 is offered in a range of configurations including ASA/ANSI, ISO, and Conflat flanges along with a full UHV version, which incorporates additional metal seals in lieu of traditional orings.
Trillium provides world-class support for your CryoTorr 10 including technical support, expert repair service, as well as a full range of spare parts and repair kits for every repair approach.
CryoTorr 10 offers the following performance. Included is the performance of the smaller and larger sizes available for comparison.
| Pumping Speed (l/s) | |||||
|---|---|---|---|---|---|
| Model | H2O | Air | H2 | Ar | Cooldown (Minutes) |
| CT4 | 1100 | 370 | 370 | 310 | 75 |
| CT8 | 4000 | 1500 | 2500 | 1200 | 90 |
| CT10 | 9000 | 3000 | 5000 | 2500 | 100 |
Trillium stocks a wide range of refurbished CryoTorr 10s for immediate exchange or outright purchase. The most popular models include the following, ask for these by PN when requesting a quote:
| CTI PN | Flange | Temp Measurement |
|---|---|---|
| 8018182 | ASA/ANSI | Diode |
| 8018184 | ASA/ANSI | VPG |
| 8018236 | ISO | Diode |
Description
The CTI CryoTorr 250F series of cryo are used primarily in the Semiconductor Ion Implant application and its primary configuration includes an ISO flange. Trillium provides world-class support for your CryoTorr 250F including technical support, expert repair service, as well as a full range of spare parts and repair kits for every repair approach.
CryoTorr 250F offers the following performance. Included is the performance of the smaller and larger sizes available for comparison.
| Pumping Speed (l/s) | |||||
|---|---|---|---|---|---|
| Model | H2O | Air | H2 | Ar | Cooldown (Minutes) |
| CT8 | 4000 | 1500 | 2500 | 1200 | 90 |
| CT250F | 6500 | 2200 | 3200 | 1800 | 120 |
| CT10 | 9000 | 3000 | 5000 | 2500 | 100 |
Trillium stocks a wide range of refurbished CryoTorr 250Fs for immediate exchange or outright purchase. The most popular models include the following, ask for these by PN when requesting a quote:
| CTI PN | Flange | Temp Measurement |
|---|---|---|
| 8039113 | ISO | Diode |
| 8039274 | ISO | Diode |
Description
Along with Trillium’s CryoPlex 16 series, the CTI CryoTorr 400 series of cryo pumps comprise the majority of 16” cryo pumps used in semiconductor, vacuum coating, and space simulation applications. Sharing the same design as Cryoplex 16, the CryoTorr 400 is offered primarily with ISO and CVC flanges.
Trillium provides world-class support for your CryoTorr 400 including technical support, expert repair service, as well as a full range of spare parts and repair kits for every repair approach.
CryoTorr 400 offers the following performance. Included is the performance of the smaller and larger sizes available for comparison.
| Pumping Speed (l/s) | |||||
|---|---|---|---|---|---|
| Model | H2O | Air | H2 | Ar | Cooldown (Minutes) |
| CT10 | 9000 | 3000 | 5000 | 2500 | 100 |
| CT400 | 16000 | 6000 | 5000 | 5000 | 150 |
| CT500 | 16000 | 6000 | 12000 | 5000 | 150 |
Trillium stocks CryoTorr 400s for immediate exchange or outright purchase. The most popular models include the following, ask for these by PN when requesting a quote:
| CTI PN | Flange | Temp Measurement |
|---|---|---|
| 8050059 | CVC | Diode |
| 8050056 | ISO | Diode |
Description
The CTI CryoTorr 500 series of cryo pumps are primarily used in vacuum coating and space simulation applications. Trillium provides world-class support for your CryoTorr 500 including technical support, expert repair service, as well as a full range of spare parts and repair kits for every repair approach.
CryoTorr 500 offers the following performance. Included is the performance of the smaller sizes available for comparison.
| Pumping Speed (l/s) | |||||
|---|---|---|---|---|---|
| Model | H2O | Air | H2 | Ar | Cooldown (Minutes) |
| CT10 | 9000 | 3000 | 5000 | 2500 | 100 |
| CT400 | 16000 | 6000 | 5000 | 5000 | 150 |
| CT500 | 16000 | 6000 | 12000 | 5000 | 150 |
Description
The CTI OnBoard 8 series of cryo pumps comprise the majority of intelligent 8” cryo pumps used in semiconductor, vacuum coating, and R&D applications. Using the same cryopumping design as CryoPlex and CryoTorr, the OnBoard 8 includes built in functionality for:
- Interfacing to a process tool directly or through a network controller
- Faster regeneration and precise 1st and 2nd stage temperature using the integrated cold head heater
- Remote regeneration by a process tool or via keypad
- Simultaneous regeneration with multiple other cryopumps in the same system
- Local access to cryo system health via the keypad or PC via RS232
Onboard 8 cryopump are offered in a range of configurations including ASA/ANSI, ISO, and Conflat flanges along with a full UHV version, which incorporates additional metal seals in lieu of traditional orings.
Trillium provides world-class support for your OnBoard 8 including technical support, expert repair service, as well as a full range of spare parts and repair kits for every repair approach.
OnBoard 8 cryos offer the following performance. Included is the performance of the smaller and larger sizes available for comparison.
| Pumping Speed (l/s) | |||||
|---|---|---|---|---|---|
| Model | H2O | Air | H2 | Ar | Cooldown (Minutes) |
| OnBoard 4 | 1100 | 370 | 370 | 310 | 75 |
| OnBoard 8 | 4000 | 1500 | 2500 | 1200 | 90 |
| OnBoard 10 | 9000 | 3000 | 5000 | 2500 | 100 |
Trillium stocks a wide range of refurbished OnBoard 8s for immediate exchange or outright purchase. The most popular models include the following, ask for these by PN when requesting a quote:
| CTI PN | Flange | Array Type | Motor Type |
|---|---|---|---|
| 8116014G00X | ASA | Standard | 2 Phase |
| 8116176G001 | ASA | Standard | 2 Phase |
| 8116208G001 | ASA | Standard | 2 Phase |
Description
The CTI OnBoard 8F series of cryo pumps comprise the majority of intelligent 8” cryo pumps used in semiconductor, vacuum coating, and R&D applications. Using the same cryopumping design as CryoPlex and CryoTorr, the OnBoard 8F includes built in functionality for:
- Interfacing to a process tool directly or through a network controller
- Faster regeneration and precise 1st and 2nd stage temperature using the integrated cold head heater
- Remote regeneration by a process tool or via keypad
- Simultaneous regeneration with multiple other cryopumps in the same system
- Local access to cryo system health via the keypad or PC via RS232
Onboard 8F cryopumps are offered in a range of configurations including ASA/ANSI, ISO, and Conflat flanges along with a full UHV version, which incorporates additional metal seals in lieu of traditional orings.
Trillium provides world-class support for your OnBoard 8F including technical support, expert repair service, as well as a full range of spare parts and repair kits for every repair approach.
OnBoard 8F cryos offer the following performance. Included is the performance of the smaller and larger sizes available for comparison.
| Pumping Speed (l/s) | |||||
|---|---|---|---|---|---|
| Model | H2O | Air | H2 | Ar | Cooldown (Minutes) |
| OnBoard 4F | 1100 | 370 | 370 | 310 | 75 |
| OnBoard 8F | 4000 | 1500 | 2500 | 1200 | 90 |
| OnBoard 250F | 6500 | 2200 | 3200 | 1800 | 120 |
Trillium stocks a wide range of refurbished OnBoard 8Fs for immediate exchange or outright purchase. The most popular models include the following, ask for these by PN when requesting a quote:
| CTI PN | Flange | Array Type |
|---|---|---|
| 8116071G001 | Conflat | Enhanced |
| 8116142G001 | Conflat | Standard |
| 8116143G001 | Conflat | Standard |
Description
The CTI OnBoard 10 series of cryo pumps comprise the majority of intelligent 10” cryo pumps used in semiconductor, vacuum coating, and R&D applications. Using the same cryopumping design as CryoPlex and CryoTorr, the OnBoard 10 includes built in functionality for:
- Interfacing to a process tool directly or through a network controller
- Faster regeneration and precise 1st and 2nd stage temperature using the integrated cold head heater
- Remote regeneration by a process tool or via keypad
- Simultaneous regeneration with multiple other cryopumps in the same system
- Local access to cryo system health via the keypad or PC via RS232
Onboard 10 cryopump are offered in a range of configurations including ASA/ANSI, ISO, and Conflat flanges along with a full UHV version, which incorporates additional metal seals in lieu of traditional orings.
Trillium provides world-class support for your OnBoard 10 including technical support, expert repair service, as well as a full range of spare parts and repair kits for every repair approach.
OnBoard 10 cryos offer the following performance. Included is the performance of the smaller and larger sizes available for comparison.
| Pumping Speed (l/s) | |||||
|---|---|---|---|---|---|
| Model | H2O | Air | H2 | Ar | Cooldown (Minutes) |
| OnBoard 8 | 4000 | 1500 | 2500 | 1200 | 90 |
| OnBoard 10 | 9000 | 3000 | 5000 | 2500 | 100 |
| OnBoard 400 | 16000 | 6000 | 5000 | 5000 | 150 |
Trillium stocks a wide range of refurbished OnBoard 10s for immediate exchange or outright purchase. The most popular models include the following, ask for these by PN when requesting a quote:
| CTI PN | Flange | Array Type | Motor Type |
|---|---|---|---|
| 8116013G00X | ASA | Standard | 2 Phase |
| 8116148G00X | ASA | Standard | 2 Phase |
| 8116209G001 | ASA | Standard | 2 Phase |
Description
The CTI OnBoard 250F series of cryo are used primarily in the Semiconductor Ion Implant application and its primary configuration includes an ISO flange. The OnBoard 250F includes built in functionality for:
- Interfacing to a process tool directly or through a network controller
- Faster regeneration and precise 1st and 2nd stage temperature using the integrated cold head heater
- Remote regeneration by a process tool or via keypad
- Simultaneous regeneration with multiple other cryopumps in the same system
- Local access to cryo system health via the keypad or PC via RS232
Trillium provides world-class support for your OnBoard 250F including technical support, expert repair service, as well as a full range of spare parts and repair kits for every repair approach.
OnBoard 250F offers the following performance. Included is the performance of the smaller and larger sizes available for comparison.
| Pumping Speed (l/s) | |||||
|---|---|---|---|---|---|
| Model | H2O | Air | H2 | Ar | Cooldown (Minutes) |
| OnBoard 8 | 4000 | 1500 | 2500 | 1200 | 90 |
| OnBoard 10 | 6500 | 2200 | 3200 | 1800 | 120 |
| OnBoard 10 | 9000 | 3000 | 5000 | 2500 | 100 |
Trillium stocks a wide range of refurbished OnBoard 250Fs for immediate exchange or outright purchase. The most popular models include the following, ask for these by PN when requesting a quote:
| CTI PN | Flange | Array Type | Motor Type |
|---|---|---|---|
| 8116028G001 | ISO | Standard | 2 Phase |
| 8116185G001 | ISO | Standard | 2 Phase |
| 8116210G001 | ISO | Standard | 2 Phase |
Description
The CTI OnBoard 400 series of cryo pumps comprise the majority of intelligent 16” cryo pumps used in semiconductor, vacuum coating, and R&D applications. Using the same cryopumping design as CryoPlex and CryoTorr, the OnBoard 400 includes built in functionality for:
- Interfacing to a process tool directly or through a network controller
- Faster regeneration and precise 1st and 2nd stage temperature using the integrated cold head heater
- Remote regeneration by a process tool or via keypad
- Simultaneous regeneration with multiple other cryopumps in the same system
- Local access to cryo system health via the keypad or PC via RS232
Onboard 400 cryopumps are offered in a range of configurations including ASA/ANSI, ISO, and Conflat flanges along with a full UHV version, which incorporates additional metal seals in lieu of traditional orings.
Trillium provides world-class support for your OnBoard 400 including technical support, expert repair service, as well as a full range of spare parts and repair kits for every repair approach.
OnBoard 400 cryos offer the following performance. Included is the performance of the smaller and larger sizes available for comparison.
| Pumping Speed (l/s) | |||||
|---|---|---|---|---|---|
| Model | H2O | Air | H2 | Ar | Cooldown (Minutes) |
| OnBoard 10 | 9000 | 3000 | 5000 | 2500 | 100 |
| OnBoard 400 | 16000 | 6000 | 5000 | 5000 | 150 |
| OnBoard 500 | 16000 | 6000 | 12000 | 5000 | 150 |
Trillium stocks OnBoard 400s for immediate exchange or outright purchase. The most popular models include the following, ask for these by PN when requesting a quote:
| CTI PN | Flange | Array Type | Motor Type |
|---|---|---|---|
| 8116109G00X | ISO | Enhanced | 2 Phase |
| 8116240G00X | CVC | Standard | 2 Phase |
Description
The CTI OnBoard 500 series of cryo pumps are primarily used in vacuum coating and space simulation applications. Trillium provides world-class support for your OnBoard 500 including technical support, expert repair service, as well as a full range of spare parts and repair kits for every repair approach.
OnBoard 500 offers the following performance. Included is the performance of the smaller sizes available for comparison.
| Pumping Speed (l/s) | |||||
|---|---|---|---|---|---|
| Model | H2O | Air | H2 | Ar | Cooldown (Minutes) |
| OnBoard 10 | 9000 | 3000 | 5000 | 2500 | 100 |
| OnBoard 400 | 16000 | 6000 | 5000 | 5000 | 150 |
| OnBoard 400 | 16000 | 6000 | 12000 | 5000 | 150 |
Description
The CTI OnBoard IS 8F series of cryo pumps comprise the majority of intelligent 8” cryo pumps used in 300mm semiconductor PVD applications. Using a very similar cryopumping design as the OnBoard 8F , the OnBoard IS 8F includes the added benefit of inverter driven motor control to optimize energy consumption.
Onboard IS 8F cryopumps are offered in a range of configurations including ASA/ANSI, ISO, and Conflat flanges along with a full UHV version, which incorporates additional metal seals in lieu of traditional orings.
Trillium provides world-class support for your OnBoard IS 8F including technical support, expert repair service, as well as a full range of spare parts and repair kits for every repair approach.
OnBoard IS 8F cryos offer the following performance. Included is the performance of the larger size available for comparison.
| Pumping Speed (l/s) | |||||
|---|---|---|---|---|---|
| Model | H2O | Air | H2 | Ar | Cooldown (Minutes) |
| OnBoard IS 8F | 4000 | 1500 | 2500 | 1200 | 90 |
| OnBoard IS 250F | 6500 | 2200 | 3200 | 1800 | 120 |
Description
The CTI OnBoard IS 250F and 250FE series of cryo pumps are used extensively in 300mm semiconductor Implant applications. Using a very similar cryopumping design as the OnBoard 250F, the OnBoard IS 250F includes the added benefit of inverter driven motor control to optimize energy consumption. FE versions are Enhanced to improve Hydrogen pumping capacity.
Onboard IS 250F cryopumps are offered in a range of configurations including ASA/ANSI, ISO, and Conflat flanges along with a full UHV version, which incorporates additional metal seals in lieu of traditional orings.
Trillium provides world-class support for your OnBoard IS 250F and 250FE including technical support, expert repair service, as well as a full range of spare parts and repair kits for every repair approach.
OnBoard IS 250F cryos offer the following performance. Included is the performance of the smaller and larger sizes available for comparison.
| Pumping Speed (l/s) | |||||
|---|---|---|---|---|---|
| Model | H2O | Air | H2 | Ar | Cooldown (Minutes) |
| OnBoard IS 8F | 4000 | 1500 | 2500 | 1200 | 90 |
| OnBoard IS 250F/E 10 | 6500 | 2200 | 4500 (7000*) | 1800 | 120 |
| OnBoard IS 320F/E | 11000 | 3600 | 9000 (12500*) | 3000 | 150 |
*FE Version
Description
The CTI OnBoard IS 320F and 320FE series of cryo pumps are used extensively in 300mm semiconductor Implant applications. Using a very similar cryopumping design as the OnBoard 320F, the OnBoard IS 320F includes the added benefit of inverter driven motor control to optimize energy consumption. FE versions are Enhanced to improve Hydrogen pumping capacity.
Onboard IS 320F cryopumps are offered in a range of configurations including ASA/ANSI, ISO, and Conflat flanges along with a full UHV version, which incorporates additional metal seals in lieu of traditional orings.
Trillium provides world-class support for your OnBoard IS 320F and 320FE including technical support, expert repair service, as well as a full range of spare parts and repair kits for every repair approach.
OnBoard IS 320F cryos offer the following performance. Included is the performance of the smaller and larger sizes available for comparison.
| Pumping Speed (l/s) | |||||
|---|---|---|---|---|---|
| Model | H2O | Air | H2 | Ar | Cooldown (Minutes) |
| OnBoard IS 8F | 4000 | 1500 | 2500 | 1200 | 90 |
| OnBoard IS 250F/E 10 | 6500 | 2200 | 4500 (7000*) | 1800 | 120 |
| OnBoard IS 320F/E | 11000 | 3600 | 9000 (12500*) | 3000 | 150 |
*FE Version